Plasma-surface interactions 3
15 September 2023
Conferences, Oral
SURF
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SURF 3
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10:35
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12:05
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Plasma-surface interactions 3
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Ella Fitzgerald room
SURF
10:35
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SURF3-K1-068
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Electrochemical characterization of surface damage in n-type GaN induced by Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) and Atomic Layer Etching (ALE)
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C.
Carole
PERNEL
11:05
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SURF3-O1-050
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Deep etching of bulk titanium in fluorinated plasmas for biomedical devices
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R.
Rim
ETTOURI
11:25
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SURF3-O3-145
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Properties of nitrided layers produced in an active-screen plasma nitriding process
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G.
Grégory
MARCOS
11:45
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SURF3-O4-104
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Dual-phase nanocomposite coatings based on crystalline ZrN and glassy ZrCu
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P.
Petr
ZEMAN
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