Plasma-surface interactions 1
12 September 2023
Conferences, Oral
SURF
•
SURF 1
•
10:35
>
12:15
•
Plasma-surface interactions 1
•
Antipolis Auditorium
SURF
10:35
•
SURF1-O1-019
•
Gas- and plasma-surface interactions in cryogenic conditions: a quasi in situ XPS study on Si substrates
>
C.
Christophe
CARDINAUD
10:55
•
SURF1-O2-034
•
Selective cryoetching plasma process of Si3N4
>
R.
Rémi
DUSSART
11:15
•
SURF1-O3-049
•
Photoresist removal in MEMS fabrication process with HDRF®, optimized chemistry by adding hydrogen radical in oxygen process
>
M.
Marc
SEGERS
11:35
•
SURF1-O4-108
•
Effects of the substitution of Ar by Kr in ALE process of GaN
>
C.
Cédric
MANNEQUIN
11:55
•
SURF1-O5-081
•
Impact of temperature towards the reduction of C4F8 passivating gas-flow during bosch processing
>
J.
Jack
NOS
|