Plasma-surface interactions 1
12 September 2023
Conferences, Oral
SURF
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SURF 1
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10:35
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12:15
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Plasma-surface interactions 1
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Antipolis Auditorium
SURF
10:35
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SURF1-O1-019
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Gas- and plasma-surface interactions in cryogenic conditions: a quasi in situ XPS study on Si substrates
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C.
Christophe
CARDINAUD (Nantes)
10:55
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SURF1-O2-034
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Selective cryoetching plasma process of Si3N4
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R.
Rémi
DUSSART (Orléans)
11:15
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SURF1-O3-049
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Photoresist removal in MEMS fabrication process with HDRF®, optimized chemistry by adding hydrogen radical in oxygen process
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M.
Marc
SEGERS (Bernin)
11:35
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SURF1-O4-108
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Effects of the substitution of Ar by Kr in ALE process of GaN
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C.
Cédric
MANNEQUIN (Nantes)
11:55
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SURF1-O5-081
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Impact of temperature towards the reduction of C4F8 passivating gas-flow during bosch processing
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J.
Jack
NOS (Orléans)
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