Plasma surface processing 2

23 September 2025
PSURF PSURF 2 16:15 > 17:25 Plasma surface processing 2 Ella Fitzgerald room PSURF

16:15 PSURF2-K1-090 Numerical simulations and ion beam experiments for the analyses of surface reactions for reactive ion etching > S. Satoshi HAMAGUCHI (Osaka) 16:45 PSURF2-O1-107 Enhancing plasma etching efficiency via physics-based modeling, experimental measurements, machine learning, and optimization algorithms > G. George KOKKORIS (Athens) 17:05 PSURF2-O2-049 Formation of black silicon microstructures by the stiger etching process for microfluidic applications > A. Ayoub RAHALI (Orléans)

 


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